Chemical surface preparation, passivation and cleaning for semiconductor growth and processing.
Nemanich, R. J. et al
Chemical surface preparation, passivation and cleaning for semiconductor growth and processing. - Pittsburgh : Materials research society, 1992. - 529 p. - /Materials research society symposium proceedings -- v.259/ . - /Materials research society symposium proceedings -- v.259/ .
SEMICONDUCTORS
CRYSTAL GROWTH
Chemical surface preparation, passivation and cleaning for semiconductor growth and processing. - Pittsburgh : Materials research society, 1992. - 529 p. - /Materials research society symposium proceedings -- v.259/ . - /Materials research society symposium proceedings -- v.259/ .
SEMICONDUCTORS
CRYSTAL GROWTH