Electron beam interactions with solids for microscopy, microanalysis and microlithography.

Kyser, David F.

Electron beam interactions with solids for microscopy, microanalysis and microlithography. - AMF O'Hare, Il. : Scanning electron microscopy, c1984. - 372 p. : il. ; 28,5 cm.

Held at the Asilomar conference center Bibliografía al final de cada artículo

0931288304


RADIACIONES -EFECTOS EN SOLIDOS -CONGRESOS
MICROSCOPIA ELECTRONICA

539.2:539.12.04"1982" 537.533.35